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Airborne Particle Sensor

Photonics Spectra
Apr 2011
CyberOptics Corp.Request Info
 
Available from CyberOptics Semiconductor Inc., the WaferSense airborne particle sensor moves through semiconductor process equipment and automation materials handling systems to monitor airborne particles. It reports information in real time to allow engineers to efficiently validate wafer contamination. The instrument has a waferlike shape compatible with existing automation, and its wireless communication provides real-time data. The metrology device reduces the time required to locate particle sources, speeding tool qualification and release to production. It also can be used to establish a baseline and to ensure that operations continue on this baseline as part of preventive maintenance. The sensor uses a fan to pull noncorrosive gas or air through a channel, and a laser illuminates the air/gas stream while particles scatter light onto the sensor’s photodiode.


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GLOSSARY
metrology
The science of measurement, particularly of lengths and angles.
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