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  • High-Precision Vacuum Stages
Apr 2011
Steinmeyer Inc.Request Info
BURLINGTON, Mass., April 21, 2011 — Steinmeyer Inc. offers a range of precision stages suitable for ultrahigh-vacuum applications. The model MT105-LM-HV is one example. Shown is a compact two-axis (X-Z) version with a travel range choice of 30 or 50 mm. Positioning accuracy is 3 µm, with repeatability of ±0.2 µm. This product can be provided as a classic X-Y stage without adapter plate and can also be configured as an X-Y-Z system.

Driven by a piezo motor, each stage includes stainless steel crossed roller linear bearings for smooth motion and robust load capacity. Both base and saddle are manufactured from high-stiffness aluminum. All other components and hardware are selected for ultrahigh vacuum use (10E-10 torr).

Exhibiting good dynamic performance, the stages are suitable for demanding positioning applications including scanning electron microscopy, electron-beam processing and particle accelerators.

All vacuum stages are cleanroom-assembled with components chosen for low outgassing properties as well as low collected volatile condensable materials.


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