NESSY II: For Coatings in EUV Applications
May 2011Buhler Inc., Business Area Leybold OpticsRequest Info
Leybold Optics has developed the second generation of a unique
sputtering system for coating at 13.4 nm – the EUV range. The coating system
can feature up to six sputtering targets to coat MO and Si layers. The layer systems
consist of more than 100 layers with very tight thickness specifications that require
high precision, high stability and excellent reproducibility. The machine also features
a load lock. The tool is used for applications in EUV lithography.