Six-Axis Parallel Positioner
Jun 2011PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
PI (Physik Instrumente) L.P. has launched a miniature hexapod.
Two versions, for standard conditions and for vacuum applications, are available.
The M-811 hexapod measures 130 mm in diameter and 115 mm in height. It can accommodate
loads up to 5 kg and can position them in all six degrees of freedom with submicron
precision. It features actuator resolution of 0.04 μm, repeatability of ±0.5
μm and a randomized center of rotation. Velocity is to 10 mm/s, X-Y-Z travel
is 35/35/13 mm, and X-Y-Z rotations are 20°/20°/40°. The vacuum parallel
kinematic hexapod positioner is bundled with software and a digital controller with
high-speed Ethernet connectivity. The device is relatively simple to program and
command because all positions are given in Cartesian coordinates.