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SD1024G Spectrographs

Photonics.com
Jun 2011
Verity Instruments Inc.Request Info
 
CARROLLTON, Texas, June 28, 2011 — Verity Instruments Inc. has released its next-generation spectrographs, the SD1024G series, direct replacements for the SD1024F. The instruments feature significantly reduced system noise, providing improved end-pointing capability in moderate-to-low-light applications.

The spectrographs are designed for demanding semiconductor process control applications such as low exposed area contact etch, ion beam etch and photomask etch. They can be used within a spectral reflectometer for film thickness or depth measurement. Their 200- to 800-nm spectral-range optical system employs a thermoelectrically cooled CCD detector with good ultraviolet response, high sensitivity, low noise and wide dynamic range.

Also released is the SD1024GH, a high-performance version that incorporates high-efficiency optics for good light throughput (higher signal) over the entire spectral range of the instrument.

Both instruments are supplied with proprietary SpectraView application software. Tool integration is achieved via RS-232, Ethernet and digital input/output.

The SD1024G series products are RoHS-compliant.


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