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PI Physik Instrumente - Space Qualified Steering LW 1-15 MR

SD1024G Spectrographs

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Verity Instruments Inc.
CARROLLTON, Texas, June 28, 2011 — Verity Instruments Inc. has released its next-generation spectrographs, the SD1024G series, direct replacements for the SD1024F. The instruments feature significantly reduced system noise, providing improved end-pointing capability in moderate-to-low-light applications. The spectrographs are designed for demanding semiconductor process control applications such as low exposed area contact etch, ion beam etch and photomask etch. They can be used within a spectral reflectometer for film thickness or depth measurement. Their 200- to 800-nm spectral-range optical system employs a...See full product

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