UCS 120 Cleaning Line for Optics
Buhler Inc., Business Area Leybold OpticsRequest Info
The UCS 120 has been designed to prepare precision optics
up to 8-in. wafer diameter for vacuum deposition. The process guarantees a high
degree of cleaning and can be used on other interstage cleaning operations. This
very compact multistage cleaning system stands on casters. Typical substrate size
is 10 to 220 mm, and the cycle time is 4 to 5 min per stage. The production capacity
for 8-in. wafers is 60 per hour
http://www.leyboldoptics.com
/Buyers_Guide/Buhler_Inc_Business_Area_Leybold_Optics/c8437
Published: July 2011
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