Request InfoPI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo MechanicsAUBURN, Mass., July 12, 2011 — PI (Physik Instrumente) L.P. has released a higher-precision version of its M-660 low-profile rotary table. Driven by piezo motors that enable a profile of 14 mm, the new model is equipped with a high-accuracy direct measuring encoder and provides eight times the position resolution of the existing version. The M-660 rotary table can accelerate to velocities of 720°/s, with an unlimited travel range, and its directly coupled precision optical encoder resolves positions down to 4 µrad (0.00023°), providing phase-lag-free, backlash-free feedback to the servo...See full productRelated content from Photonics MediaPRODUCTSPhotonics Spectra August 2023 IssueSemiconductor Metrology ToolThe FRT MicroProf® PT from FormFactor Inc. is a metrology and inspection system for high-throughput panel measurement in advanced packaging. 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