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Electron Probe Microanalyzer

Photonics Spectra
Aug 2011
Cameca SASRequest Info
 
For quantitative microanalysis and x-ray imaging at high spatial resolution, Cameca, a unit of Ametek’s Materials Analysis Div., has unveiled the SXFiveFE, a field emission electron probe microanalyzer (FE-EPMA). It combines proprietary technology with new developments in general-purpose electron probe microanalyzers, including the addition of a field emission source. It features a field emission electron column and the company’s high-sensitivity and high-resolution spectrometers. The instrument is suitable for a range of applications, from geochronology, mineralogy and nuclear forensics to materials, thin films and semiconductor research. The EPMA platform is available in two configurations: SXFive with W and LaB6 sources and SXFiveFE with a field emission source. Both deliver submicron spatial resolution, extending EPMA capabilities to smaller analyzed volumes.


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