Sep 2011Verity Instruments Inc.Request Info
Verity Instruments Inc. has released its next-generation spectrographs,
the SD1024G series, direct replacements for the SD1024F. The instruments feature
reduced system noise, providing improved end-pointing capability in moderate-to-low-light
applications. They are designed for demanding semiconductor process control applications
such as low exposed area contact etch, ion beam etch and photomask etch. They can
be used within a spectral reflectometer for film thickness or depth measurement.
Their 200- to 800-nm spectral range optical system uses a thermoelectrically cooled
CCD detector with good ultraviolet response, high sensitivity, low noise and a wide
dynamic range. Also released is the SD1024GH, a high-performance version that incorporates
high-efficiency optics for good light throughput (higher signal) over the entire
spectral range of the instrument. SpectraView application software is supplied.