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  • Sensor System

Photonics Spectra
Oct 2011
Kaman Precision Products, Measuring SystemsRequest Info
The SMT-9700 system from Kaman Precision Products | Measuring's uses inductive (eddy current) technology to provide nanometer/subnanometer-resolution, noncontact position/displacement feedback of virtually any electrically conductive target. It is suitable for applications requiring high-resolution position feedback for control and has been used for optics positioning in photolithography equipment, X-Y-Z stage positioning in atomic force microscopy, and spindle positioning in the fluid-drenched environment of bearing race precision grinding equipment. Performance flexibility makes the system useful for the OEM. The company can vary the frequency response and linearity or a combination thereof to achieve high performance. Calibrated range and sensor size can be chosen according to application needs. The company's computer modeling provides expected performance specifications before commitment to hardware.


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