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LTA Actuators and URS50B Stage

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MKS/Newport
IRVINE, Calif., Oct. 7, 2011 — Newport Corp. has announced the vacuum-compatible LTA series actuators and the URS50B rotation stage for research and industrial applications. They are compatible with 10 × e-6 hPa (7 × 10 e-6 torr) vacuum and are designed for integration in critical sample positioning or beam management processes in vacuum environments. The newly designed vacuum stage features a motor-mounted encoder that is useful in detecting the stall of a stepper motor because the stage is not accessible when installed inside a vacuum chamber. The encoder offers good position repeatability, a critical...See full product

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