Search Menu
Photonics Media Photonics Buyers' Guide Photonics EDU Photonics Spectra BioPhotonics EuroPhotonics Industrial Photonics Photonics Showcase Photonics ProdSpec Photonics Handbook
More News
Email Facebook Twitter Google+ LinkedIn

  • iXH500H Dry Pump Series
Oct 2011
Edwards Ltd.Request Info
CRAWLEY, England, Oct. 26, 2011 — Edwards Ltd. has expanded its iXH family of harsh process dry pumps with the introduction of the iXH500H series, optimized for flat panel, solar and advanced semiconductor processes requiring high gas flows and flexible pump temperature profiles.

The pumps offer significant cost of ownership benefits as a result of lower energy consumption and enhanced mean time between servicing, while delivering the small footprint and hydrogen pumping capabilities of the iXH450 series and reducing pump energy consumption by up to 15%.

Vacuum pumps used by flat panel, solar and semiconductor manufacturers must accommodate a wide range of operating conditions and materials. The new models’ temperature flexibility makes them suitable for such harsh processes. Running at low pump temperatures is beneficial for processes that use high flows of corrosive gases, such as flat panel display plasma-enhanced chemical vapor deposition (PECVD), thin-film solar PECVD and semiconductor metallorganic chemical vapor deposition (MOCVD), or for processes that use thermally sensitive precursors, such as atomic layer deposition, that could “plate out” byproducts within the pump. High operating temperatures can be used where the risk is condensation of byproducts within the pump; e.g., high-k dielectric deposition.

The pumps are now available, as are service upgrades to convert existing iXH450 series pumps to the new iXH500H series.


* Message:
(requirements, questions for supplier)
Your contact information
* First Name:
* Last Name:
* Email Address:
* Company:
Address 2:
Postal Code:
* Country:
Phone #:
Fax #:

Register or login to auto-populate this form:
Login Register
* Required
Terms & Conditions Privacy Policy About Us Contact Us
back to top

Facebook Twitter Instagram LinkedIn YouTube RSS
©2016 Photonics Media
x We deliver – right to your inbox. Subscribe FREE to our newsletters.