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  • 3FD Quadrupole Mass Spectrometer
Nov 2011
Hiden Analytical Ltd.Request Info
WARRINGTON, England, Nov. 17, 2011 — For researchers operating in the ultrahigh-/extremely high vacuum regime, the 3F series quadrupole mass spectrometers from Hiden Analytical Ltd. now features direct digital signal detection for fast response and sensitive detection levels. The spectrometers also are suitable for use in specialized fast-event gaseous studies at pressures to atmosphere and beyond.

The 3FD system integrates triple-stage mass filter technology with digital data acquisition by direct positive ion counting (pulse counting) to combine a continuous detection range of seven full decades with a detection rate from just 1 ion per second and abundance sensitivity measurements to the parts-per-billion regime. The integral data accumulation mode enables operation with time-functioned data acquisition for suppression of fundamental ion statistical noise. Vacuum partial pressures to 5 × 10 E–15 mbar are detectable.

Ionization source options are available for conventional residual gas analysis, for surface desorption studies and for molecular/laser beam measurements. Single- and multiple-stage pressure reduction systems are available for operation at higher pressures beyond the ultrahigh-vacuum range. Requirements for measurement of externally generated positive ions and for measurement of both positive and negative ions are addressed by the alternative EP/EQ series. A custom design service is available for specialized applications.


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residual gas analysis
A measurement in optical thin-film coating processes whereby the gases remaining in the vacuum chamber after coating are characterized by mass spectroscopy.
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