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Quadrupole Mass Spectrometer

Photonics Spectra
Feb 2012
Hiden Analytical Ltd.Request Info
 
The 3F series quadrupole mass spectrometers from Hiden Analytical Ltd. now feature direct digital signal detection that provides fast response and sensitive detection levels. Designed for research in the ultrahigh-/extremely high vacuum regime, they also are suitable for use in specialized fast-event gaseous studies at pressures to atmosphere and beyond. The 3FD system integrates triple-stage mass filter technology with digital data acquisition by direct positive ion counting (pulse counting). This combines a continuous detection range of seven full decades with a detection rate from just one ion per second and abundance sensitivity measurements to the parts-per-billion regime. The integral data accumulation mode enables operation with time-functioned data acquisition for suppression of fundamental ion statistical noise.


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GLOSSARY
residual gas analysis
A measurement in optical thin-film coating processes whereby the gases remaining in the vacuum chamber after coating are characterized by mass spectroscopy.
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