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Microscope Z-Drive

Photonics Spectra
Feb 2012
FEI Munich GmbHRequest Info
 
Till Photonics has introduced a fast microscope Z-drive, the VoiceCoil. The system combines the 22-mm range of a stepper motor-driven coarse drive with piezo precision at high speeds. It offers 20-nm pattern placement accuracy at full range, enabling high-quality 3-D scans. A 10-ms settling time for a 2-µm step enables Z-stacks that are limited only by camera speed. The Z-drive works like a dynamic loudspeaker, where the coil moves the membrane of the speaker. The microscope objective in the VoiceCoil replaces the membrane, and a precise optical position measurement system with closed-loop feedback ensures nanometer-precise position control of the objective. The VoiceCoil Z-drive will be used in the company's digital microscope, the iMIC.


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