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VIBRATION ISOLATION

Photonics Spectra
Nov 1999
TMCRequest Info
 
pVIBRAElectro-Damp II, a vibration isolation system from Technical Manufacturing Corp., is designed to increase throughput, resolution and yield in semiconductor manufacturing applications. It has feed-forward, high-force and high-clearance actuators, and multiple digital user interfaces for use in steppers and metrology tools. The modular design allows users to customize the system for their specific applications, such as electromagnetic actuation for lighter stages with high acceleration rates.


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