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Microlithography Optics

Photonics Showcase
May 2012
TRIOPTICS GmbHRequest Info
 
OptiCentric® Max UltraPrecision for alignment, assembly and final inspection is an all-granite, all-air bearing construction which provides stability and smooth motion. It features accurate measurement of centration errors, lens center thickness and air gap distances. An alignment unit equipped with heavy duty piezoelectric actuators provides automated alignment with submicron accuracy. Designed for stepper and space optics (diameter 800 mm, height 2000 mm, weight 1500 kg).


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