PRECISION STAGE DOCKING
Dec 1999TMCRequest Info
Technical Manufacturing Corp. has introduced a stage-docking system for pneumatic vibration- isolation systems. FastDock is designed for metrology tools and steppers that require position repeatability for loading and unloading wafers. Using kinematic mounting with roller-bearing mounts, the system is accurate to within ±100 µm. It has a payload docking time of less than 1 s, as well as a comparable refloat time. The FastDock system includes components needed to retrofit isolation systems, including mounting hardware, air tubing, fittings and detailed instructions.