Request InfoTMCTechnical Manufacturing Corp. has introduced a stage-docking system for pneumatic vibration- isolation systems. FastDock is designed for metrology tools and steppers that require position repeatability for loading and unloading wafers. Using kinematic mounting with roller-bearing mounts, the system is accurate to within ±100 µm. It has a payload docking time of less than 1 s, as well as a comparable refloat time. The FastDock system includes components needed to retrofit isolation systems, including mounting hardware, air tubing, fittings and detailed instructions.See full productRelated content from Photonics MediaPRODUCTSPhotonics Spectra July 2023 Issue3D Metrology ScannerThe FreeScan Combo 3D metrology scanner from SHINING 3D Tech Co. Ltd. adopts metrology-grade accuracy, fine scanning, and high precision with a light, compact design. 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