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Micro Stages

Photonics.com
Oct 2012
Steinmeyer Inc.Request Info
 
BURLINGTON, Mass., Oct. 23, 2012 — Steinmeyer Inc. has announced the MT 196LM series high-precision micro stages. Available in travel options of 100 or 200 mm, the MT196-100-2LM and the MT196-200-2LM are for applications in the semiconductor metrology, biomedical, miniature robotics and laser industries.

The MT196LM has a footprint of 110 × 196 mm, height of 45 mm and, depending upon which stage you choose, weighs 4.1 or 4.7 kg. Manufactured from high-strength anodized aluminum, the stages offer positional accuracy of 2 µm, straightness/flatness runout of ±5 µm for 100 mm of travel and ±10 µm for 200 mm, with repeatability of ±0.2 µm.

Features include preloaded cross roller bearings, fixed stops, an incremental linear encoder with 0.1-µm resolution and a linear piezo motor drive. The stages are available as X-Y stages without any adapter plate. Ultrahigh-vacuum, cleanroom or nonmagnetic preparation is available upon request.


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