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ZeGage Optical Profiler

Zygo Corporation, Metrology Solutions Div.

MIDDLEFIELD, Conn., Dec. 5, 2012 — Providing nanometer-level surface measurement precision on the production floor, Zygo Corp.’s ZeGage optical profiler is now available with programmable stage capabilities.

With a motorized programmable X-Y stage, the profiler stitches adjacent measurements into contiguous, high-resolution 3-D plots. Another benefit of an automated stage is the ability to sample sets of parts or sample different locations on the same part.

Designed for production metrology, the profiler features SureScan technology, providing reliable measurements even in vibration-prone environments. It performs 3-D optical surface metrology with precision below 3.5 nm.


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