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Deep-UV Excimer Laser Mirrors

Newport Corp.

IRVINE, Calif., Feb. 5, 2013 — Newport Corp. has announced deep-ultraviolet excimer laser mirrors with projected lifetimes of >30 billion pulses when used in the proper photocontamination-controlled environment. They feature all-dielectric high-reflector coatings to minimize absorption and maximize reflected energy at 193 nm.

The high-energy laser mirrors are designed with excimer-grade UV fused silica substrates that are polished to better than λ/10 flatness and 10-5 scratch-dig surface quality to preserve wavefront quality and maintain stability. All coating and testing are done in a special photocontamination-controlled deep-UV cleanroom that has been qualified to 193-nm standards.

Analysis, research and testing have been done to understand the conditions at these short wavelengths. The company’s coating scientists have investigated various conditions, including thermal issues, densification of materials and wavelength shift, to properly optimize the performance of the mirrors at 193 nm under long-term use.

The laser mirrors offer high laser damage resistance. Special Pet-G and metal foil packaging ensure that parts are delivered clean and protected from any environmental photocontamination.


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