MIPOS 16-158 Z-Axis Positioner
Feb 2013piezosystem jena GmbHRequest Info
JENA, Germany, Feb. 27, 2013 — piezosystem jena is offering the MIPOS 16-158 Z-axis positioner for high-precision positioning of optical systems with accuracy in the subnanometer range. The high resolution, fast response time, 158-mm aperture and stage height of 42 mm offer new possibilities for white-light interferometry.
White-light interferometry is an effective method for 3-D surface measurement. Piezoelectric actuators improve accuracy and speed due to their high resolution and fast response time. The positioner produces a focus range up to 16 μm and single-step resolution of <0.1 nm, while operating in a range between –20 and 130 V.
It is made for integration into metrology setups and devices. Features include a high-resolution piezo-based actuating system and an internal mechanical pre-load design that enables operation in high dynamic environments. Settling time is down to microseconds.
Load capacity is 3 kg. Optical setups and components can be moved horizontally and vertically without affecting accuracy and speed. The positioner can be controlled by an analog low-voltage signal, and the company provides the nano Box USB, an ultracompact single-channel controller with a USB 2.0 interface.