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Metrology System

Photonics.com
Jun 2013
Coherix Inc.Request Info
 
ANN ARBOR, Mich., June 26, 2013 — Coherix Inc. has enhanced its ShaPix metrology family with the addition of the 1500 series. Geared toward a broader range of industries and a more diverse set of users, it uses multiwavelength interferometer technology and analysis software to create micron-level, high-definition 3-D pictures, enabling manufacturers to evaluate machined parts in minutes.

Data generated by the system helps optimize product design and manufacturing processes to reduce planar surface escape points from product development through volume production. The company says the ShaPix technology has proved effective in mitigating launch issues, creating supplier part masters and extending cutting-tool life.

The compact, lightweight unit offers a 150 × 150-mm field of view and is available from stationary systems optimal for small components such as pumps to X-Y motion systems capable of measuring large machined surfaces such as deck faces. It can create full 3-D height maps of planar surfaces and can measure the profile, flatness and waviness of precision parts.

The system provides 0.05-μm Z resolution and 80-μm X-Y resolution.


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GLOSSARY
interferometry
The study and utilization of interference phenomena, based on the wave properties of light.
metrology
The science of measurement, particularly of lengths and angles.
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