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JetStep Panel Lithography System

Photonics.com
Jul 2013
Rudolph Technologies Inc.Request Info
 
FLANDERS, N.J., July 10, 2013 — Rudolph Technologies Inc.’s JetStep panel lithography system can process both glass and organic laminate panels for applications in semiconductor advanced packaging.

The system combines LCD manufacturing with on-the-fly autofocus for thick photoresists, an onboard reticle library and a 6-s reticle change-out wheel. It is compatible with the company’s suite of software products, including ProcessWORKS for run-to-run control, Discover for yield management, and ARTIST for fault detection and classification.


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