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3-D Optical Sensor System

Photonics.com
May 2015
Sensofar MetrologyRequest Info
 
BARCELONA, Spain, May 5, 2015 — Sensofar S martSuited for integration into automated production systems, the S mart 3-D optical sensor system from Sensofar Corp. can be used for inline process measurement and process control tasks.

The S mart combines confocal, interferometry and focus variation techniques in the same sensor head. When combined with a single LED light source, the system allows users to make noninvasive assessments of 3-D surface micro- and nanogeometry.

Applications include all stages of micromanufacturing, automatic optical inspection, 3-D measurement of semiconductors and surface characterization for automotive and chemical-mechanical planarization (CMP) applications.


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GLOSSARY
metrology
The science of measurement, particularly of lengths and angles.
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