3-D Optical Sensor System
May 2015Sensofar MetrologyRequest Info
BARCELONA, Spain, May 5, 2015 — Suited for integration into automated production systems, the S mart 3-D optical sensor system from Sensofar Corp. can be used for inline process measurement and process control tasks.
The S mart combines confocal, interferometry and focus variation techniques in the same sensor head. When combined with a single LED light source, the system allows users to make noninvasive assessments of 3-D surface micro- and nanogeometry.
Applications include all stages of micromanufacturing, automatic optical inspection, 3-D measurement of semiconductors and surface characterization for automotive and chemical-mechanical planarization (CMP) applications.