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Fizeau Interferometer

Photonics.com
Jun 2015
Zygo Corporation, Ultra Precision TechnologiesRequest Info
 
MIDDLEFIELD, Conn., June 26, 2015 — Zygo Verifire XLDesigned for measuring large plano surfaces such as mirrors, semiconductor wafers or optical windows, a new phase-shifting laser Fizeau interferometer from Zygo Corp. can characterize flat surfaces up to 12 in. (300 mm) in diameter.

Verifire XL is a turnkey system incorporating staging, accessories and production-oriented technology. It comes with an integrated vibration isolation platform and the company's QPSI vibration-robust acquisition technology.

It also features Mx metrology software, which includes the new Smart Averaging feature to automatically provide the best possible measurement in the shortest time.


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GLOSSARY
interferometer
An instrument that employs the interference of lightwaves to measure the accuracy of optical surfaces; it can measure a length in terms of the length of a wave of light by using interference phenomena based on the wave characteristics of light. Interferometers are used extensively for testing optical elements during manufacture. Typical designs include the Michelson, Twyman-Green and Fizeau interferometers. The basic interferometer components are a light source, a beamsplitter, a reference...
metrology
The science of measurement, particularly of lengths and angles.
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