Six-Axis Piezo Hexapod
Dec 2015PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
AUBURN, Mass., Dec. 23, 2015 — PI (Physik Instrumente) LP has announced the P-915KWEF six-axis piezo hexapod for dynamic active error compensation.
The device features a load capacity of 1500 g. A parallel-kinematic design with piezo actuator direct drives delivers results in a compact, stiff positioning solution compared to conventional multiaxis designs. A 1-kHz natural frequency is featured along with 1-nm linear resolution, 0.07-μrad angular resolution and positioning range up to 70 μm.
The hexapod may be mounted inside rotary stages to virtually eliminate wobble and eccentricity errors, and can be adapted to other long-travel positioning systems for improved multiaxis motion accuracy.
Applications include dynamic optimization of axial runout, eccentricity and evenness of rotation stages, vibration insulation, fine adjustment, mechanical manufacturing, and machining processes.