Piezo Stack and Ring Actuators
Apr 2016PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
AUBURN, Mass., April 20, 2016 — Physik Instrumente LP has announced the P-088 circular series PICMA piezo actuators and ring actuators featuring microsecond response time, sub-nm resolution and high force.
The actuators can be stacked from smaller segments to allow fast adaption for OEM needs with a short delivery time. Low operating voltage and resonant frequency up to 68 kHz are also featured.
PICMA ceramic technology is applied to the PD0xx series of miniature annular PZT chips with outer diameters from 5 to 16 mm and inner diameters of 2.5 to 8 mm. The largest diameter, 16 mm, delivers 6000 N of blocking force in circular form and 4400 N in an annular shape. A travel range of 2 μm is achieved at 100 V.
Applications include micromanufacturing, photonics and optics alignment, semiconductor test equipment, biotechnology, surface metrology, quality assurance, nanometrology, and nanopositioning.