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Metrology Inspection Capability

Photonics.com
Apr 2016
Rudolph TechnologiesRequest Info
 
WILMINGTON, Mass., April 28, 2016 — Rudolph Technologies Inc. has added high-speed 3D metrology capabilities to its NSX series of flexible inspection and measurement platforms for process development and control of die-level interconnects.

The capability incorporates a three-segment optical range, giving users the flexibility to control both smaller micro bumps and larger, traditional solder bumps with a single inspection and metrology platform.

Data is collected in seconds from millions of bumps, then analyzed by the Discover Software’s analysis database.


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GLOSSARY
metrology
The science of measurement, particularly of lengths and angles.
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