Piezo Nanopositioning Stages
Jun 2016Aerotech Inc.Request Info
PITTSBURGH, June 9, 2016 — Aerotech Inc. has announced the QNPHD linear piezo nanopositioning stages in a compact, high-stiffness package.
With a direct-metrology, capacitive sensor feedback option, high resonant frequencies, and high load capacity, the QNP is ideal for a wide range of high-speed and high-precision applications such as scanning probe microscopy, disc-drive testing and semiconductor wafer articulation. Optional closed-loop feedback using a unique capacitive sensor design allows for subnanometer resolution and single-digit nanometer linearity errors. The capacitive sensors measure the output of the positioning carriage, directly enabling superior accuracy and repeatability.
A direct-drive actuation design and optimized structure enable millisecond response and move-and-settle times. Optimized precision flexures ensure high-stiffness, long device life and high-dynamics while maintaining geometric performance for critical nanopositioning applications.