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  • Optical Inspection System
Jun 2016
NanoFocus AGRequest Info
OBERHAUSEN, Germany, June 13, 2016 — Optical Inspection SystemNanofocus AG has introduced the μsprint hp-opc 3000 system for the optical inspection of probe cards. The system enables a wafer-production process designed for the requirements of wafer test locations with a variety of different probe cards, as well as large-volume throughput.

Probe cards are test devices used for standard function tests of wafers at the end of the front-end process, after the functional structures of the electronic elements on a wafer are fully manufactured. The μsprint hp-opc 3000 system can be used to ensure wafers are in sound condition after testing, for reducing yield losses, and for minimizing the time and number of complex maintenance cycles the probe cards are subjected to regularly.


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A cross-sectional slice cut from an ingot of either single-crystal, fused, polycrystalline or amorphous material that has refined surfaces either lapped or polished. Wafers are used either as substrates for electronic device manufacturing or as optics. Typically, they are made of silicon, quartz, gallium arsenide or indium phosphide.
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