Close

Search

Search Menu
Photonics Media Photonics Buyers' Guide Photonics EDU Photonics Spectra BioPhotonics EuroPhotonics Industrial Photonics Photonics Showcase Photonics ProdSpec Photonics Handbook
More News
SPECIAL ANNOUNCEMENT
2016 Photonics Buyers' Guide Clearance! – Use Coupon Code FC16 to save 60%!
share
Email Facebook Twitter Google+ LinkedIn

Inspection and Metrology Systems

Photonics.com
Sep 2016
Rudolph TechnologiesRequest Info
 
WILMINGTON, Mass., Sept. 16, 2016 — Rudolph Technologies Inc. has announced the Firefly and Dragonfly inspection and metrology systems for advanced semiconductor manufacturing. Both systems leverage newly designed optical and imaging systems optimized for defect type, size and maximum throughput.

The Firefly system is designed for high-resolution inspection in front- and back-end applications. It is designed to detect defects smaller than one micron in multiple applications including fan-out wafer level packaging, CMOS image sensors, microelectromechanical systems and radio frequency sensors.

The Dragonfly system is designed for high-speed 2D inspection in advanced packaging processes.It targets large die, multichip advanced packaging applications, with 2D inspection sensitivity down to 2 μm, a modular approach to integrated metrology and defect analysis software. The system quickly detects, images and analyzes defects on a broad range of devices and packages. The Dragonfly system will deliver critical in-process inspection and metrology for wafer reconstitution, after develop, after etch and at each level of redistribution.


REQUEST INFO ABOUT THIS PRODUCT

* Message:
(requirements, questions for supplier)
Your contact information
* First Name:
* Last Name:
* Email Address:
* Company:
Address:
Address 2:
City:
State/Province:
Postal Code:
* Country:
Phone #:
Fax #:

Register or login to auto-populate this form:
Login Register
* Required
Terms & Conditions Privacy Policy About Us Contact Us
back to top

Facebook Twitter Instagram LinkedIn YouTube RSS
©2016 Photonics Media
x We deliver – right to your inbox. Subscribe FREE to our newsletters.