Sep 2016Prior Scientific Inc.Request Info
FULBOURN, England, Sept. 27, 2016 — Prior Scientific Inc. has announced the H112 microscope stage, featuring a travel range of more than 300 × 300 mm.
The H112 is fully compatible with a wide range of microscopes and can accommodate wafers with diameters up to 12 in. or samples up to 25 kg in weight. It also works with many robot arm wafer loaders. The transmitted light area allows transmitted and reflected light applications to be performed.
The large area scanning capability of the H112 stage is precise with a minimum step size of 0.04 μm and a repeatability of +/–0.7 μm. The device is ideal for the accurate and precise scanning of semiconductor wafers, photo masks, flat panel displays and printed circuit boards.