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Duplex Carts

Photonics.com
Oct 2016
Mass-Vac Inc., MV Products Div.Request Info
 
BILLERICA, Mass., Oct. 7, 2016 — Duplex CartsMV Products has released a new line of high-capacity, dual-vacuum inlet traps mounted on carts for large substrate vacuum deposition processes used in manufacturing thin-film transistor LCDs, organic LEDs, solar cells and crystal-growing.

MV MultiTrap Duplex Carts feature two 16-in., high-capacity vacuum inlet traps supplied with a broad selection of filter cartridges to meet specific customer requirements for high flow vacuum deposition processes. They provide up to 160 sq ft of filtration surface area, 60 grams per sq ft of particle retention, and permit easy access to process components for maintenance.

The carts can be equipped with internally cooled baffles with up to 30 sq ft of cooling surface area. Each MultiTrap unit can be mounted vertically or horizontally and can be supplied with NW-40 to ISO-160 ports. Available filter media includes pleated high-temperature polyester offered with 25- and 100-μm ratings.


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