May 1997Resonetics LLCRequest Info
The MicroMaster excimer laser micromachining system is now available
from Resonetics Inc. The MicroMaster combines the Optec LightDeck beam
delivery and control unit with the ATL SP excimer laser series. The
complete system can be obtained in three configurations depending on
the sophistication required. It includes a flexible CN positioning
module and allows the importation of process files in standard formats
for generation of 3-D structures.