The LaserMax DMI 500 is a displacement measuring interferometer for machine tool control and calibration, integrated circuit wafer processing and micropositioning. LaserMax Inc.'s device is capable of 0.083-µm resolution with a range of 500 mm. Its maximum slew rate is limited by the bandwidth of the motion controller's counter electronics up to 300 mm/s. The interferometer measures 5.3 x 2.2 x 3.3 in. and weighs less than 680 g.