Nov 2000CVI Melles GriotRequest Info
CVI Laser Corp. says that its vacuum-UV aluminum mirrors have the highest 157-nm aluminum reflectance available. They come in UV-grade fused silica and can be deposited on a variety of stock substrates including calcium fluoride. Their shorter wavelength allows more information to be placed on patterned circuit masks. The mirrors can be used in photolithography and in metrology to detect surface defects and film thickness in silicon wafers.