The ES-240 automatic inspection system for reticles, flat panels and glass color filters has been released by Eutecnics Inc. It detects pattern defects, surface particles, inclusions, scratches and stains ranging in size from 0.5 to more than 100 µm. The system accommodates batch loads and operates in multiple illumination modes, including transmitted or reflected dark- or bright-field illumination. Also featured are auto review after inspection, a flat panel display, inspection algorithms and, as an option, robotic handling. Data can be output to USB devices or via Ethernet.

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