Sarfus technology distributed by Micro Photonics Inc. and manufactured by Nanolane, is an optical quantitative imaging technique for nanometer-scale measurements of 3-D thickness, roughness, profile and step height. It is based on absolute control of the reflection properties of polarized light on contrast-enhancing supporting plates (Surfs) upon which the sample is deposited, resulting in an increase in the axial sensitivity of the optical microscope by a factor of ∼100, without a reduction in lateral resolution. A white light beam passes through a linear polarizer, producing light that is reflected by the Surf. The sample induces a change in the polarization state and, when the reflected beams pass through an analyzer, the Surf-reflected light is stopped and the sample-reflected light passes through, producing high-contrast images.

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