Optical Research Associates’ (ORA) version 9.7 of its Code V optical software includes a new 2-D image simulation function that models how an object will appear when imaged by the optical system, taking into account diffraction, lens aberrations, distortion, relative illumination and blurring caused by detector pixel size. An enhanced 1-D partial coherence function aids the design of microlithography optics, and the Gausian quadrature radial grid for defining ray sets quickens the optimization of systems that have circular or vignetted circular pupils. An expanded array of performance metrics and plots for quantifying optical system performance is offered.

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