Innovative Products | December 2006
Manufacturer: NexTech Solutions Inc.
OPTICAL INSPECTION
An optical inspection system for identifying and mapping pattern, particle and processing defects on large FPD/TFT substrates has been launched by
NexTech Solutions Inc. The modular FPDStar uses proprietary solid-state illumination, high-resolution CCD cameras and diffraction-limited optics, and it accommodates substrates measuring up to 2500 × 3000 mm. The system uses low flight-height air-bearing support, eliminating all contact on the front and back surfaces of the substrate. Glass holding and transport are accomplished via linear and nanomotor technologies to ensure accurate damage-free handling and high mean time between failures.
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