Excimers are pulsed gas lasers that deliver high pulse energies and high average output at ultraviolet and deep-ultraviolet wavelengths. As a result, the list of applications for excimer lasers continues to expand, in contrast to other types of gas lasers. Standout applications include silicon annealing in flat panel displays, refractive ophthalmic surgeries, micromachining plastics, microlithography and marking glass products. For many of these, ease of use and high reliability are economic prerequisites.

To satisfy these needs, excimer manufacturers have developed a new generation of products offering unprecedented reliability, simple operation and long-lived consumables...

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