The Talysurf CCI 6000 optical 3-D areal profiler offered by Taylor Hobson performs noncontact 3-D measurements for surface characterization. The interferometer uses a patented correlation algorithm to find the coherence peak and phase position of an interference pattern produced by a selectable bandwidth of light. Rough, specular and scattered surfaces, including materials such as glass, metal, photoresist, liquid ink, polymer and pastes, can be measured. The system accommodates profile peaks between 1 nm and 100 µm high and completes a measurement with more than 1 million data points in <10 s, with 0.01-nm Z-resolution and 0.4-µm lateral resolution. Talymap software performs high-speed data acquisition and analysis.

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