Coherent Inc. has expanded its Lambda SX industrial excimer laser series with the addition of three models, each operating at up to 300 Hz. The LSX 200C delivers 200 W at 308 nm (XeCl); the LSX 200K, 200 W at 248 nm (KrF); and the LSX 300K, 300 W at 248 nm (KrF). The lasers feature solid-state switching, an internal resonator design for improved beam stability, PowerLok technology for burst operation stabilization, and TimeLok operation for more accurate triggering and time jitter reduction. They incorporate a software interface for improved real-time control and the implementation of e-diagnostics.

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