A high-speed confocal 3-D measurement system with 64 channels has been launched by Siemens Optical Solutions. The patented Siscan model MC64 displacement sensor scans the surface at 80 mm/s with lateral and vertical resolutions of 10 and 0.5 μm, respectively. It takes 512,000 measurements per second, and to increase throughput, multiple sensors can be used in parallel. Measurement range is up to 1.6 mm, sample rate is 8000/s, and working distance is 8 mm.

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