Sematech Inc. of Austin, Texas, has launched a joint agreement with Schott Lithotec AG of Jena, Germany, to develop mid-size, projection-quality lutetium aluminum garnet (LuAg) lens elements with an 80-mm diameter. The prototypes will establish the framework to test the feasibility of full-scale LuAG lenses, which must be ∼150 mm in diameter to accommodate high-volume manufacturing. The goal is to produce a LuAG lens in 2009 to support beta exposure tools.

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