Veeco Instruments Inc. has announced a series of enhancements to its Dimension X3D automated atomic force microscope. The upgrades include improvements to critical-dimension precision, 3-D profile metrology and line edge roughness metrology. The device’s depth metrology also has been enhanced with low-wear probe designs, such as carbon nanotubes, to improve lifetimes and the ability to measure smaller features such as nanoimprint masks.

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