Xantos XS, manufactured by Coherent Inc., is a self-contained excimer laser with an internal gas compartment consisting of a premixed laser gas bottle and all necessary gas supply equipment for laser operation. Gas can be refilled automatically without external lines. The plug-and-play device operates from a single-phase power source and requires no water cooling. It is available at all fluoride wavelengths of 157, 193, 248 and 351 nm, and it delivers moderate pulse energies at repetition rates of up to 500 Hz. The company says that the laser features long gas and tube lifetimes, good beam uniformity and high reliability. The beam cross section measures 6 × 3 mm.

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